Ultra-thin free-standing single crystalline silicon membranes with strain control
نویسندگان
چکیده
control A. Shchepetov, M. Prunnila, F. Alzina, L. Schneider, J. Cuffe, H. Jiang, E. I. Kauppinen, C. M. Sotomayor Torres, and J. Ahopelto VTT Technical Research Centre of Finland, P.O. Box 1000, FI-02044 VTT, Espoo, Finland Catalan Institute of Nanotechnology, Campus de la UAB, 08193 Bellaterra (Barcelona), Spain Nanomaterials Group, Department of Applied Physics and Center for New Materials, Aalto University School of Science, P.O. Box 15100, FI-00076 Aalto, Finland Catalan Institution for Research and Advanced Studies (ICREA), 08010 Barcelona, Spain
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